The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2017
Filed:
Sep. 04, 2012
Chia-tong Ho, Taipei, TW;
Po-feng Tsai, Taipei, TW;
Jung-chang Chen, Hsinchu, TW;
Tze-liang Lee, Hsinchu, TW;
JO Fei Wang, Hsin-Chu, TW;
Jong-i Mou, Hsinpu, TW;
Chin-hsiang Lin, Hsin-Chu, TW;
Chia-Tong Ho, Taipei, TW;
Po-Feng Tsai, Taipei, TW;
Jung-Chang Chen, Hsinchu, TW;
Tze-Liang Lee, Hsinchu, TW;
Jo Fei Wang, Hsin-Chu, TW;
Jong-I Mou, Hsinpu, TW;
Chin-Hsiang Lin, Hsin-Chu, TW;
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsin-Chu, TW;
Abstract
The present disclosure provides various methods for tool condition monitoring, including systems for implementing such monitoring. An exemplary method includes receiving data associated with a process performed on wafers by an integrated circuit manufacturing process tool; and monitoring a condition of the integrated circuit manufacturing process tool using the data. The monitoring includes evaluating the data based on an abnormality identification criterion, an abnormality filtering criterion, and an abnormality threshold to determine whether the data meets an alarm threshold. The method may further include issuing an alarm when the data meets the alarm threshold.