The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2017
Filed:
Dec. 15, 2014
Mitutoyo Corporation, Kawasaki, Kanagawa, JP;
MITUTOYO CORPORATION, Kawasaki, JP;
Abstract
A light interference measuring device comprises: a light sourcethat outputs light; a beam splitterthat causes the light output from the light source to diverge into a reference optical path and a measurement optical path and that outputs a combined wave in which reflection light that has passed through the reference optical path and reflection light that has passed through a measuring object arranged in the measurement optical path are combined; a reference mirrorthat is arranged in the reference optical path and that reflects light which is diverged into the reference optical path by the beam splitter; a stagethat is arranged in the measurement optical path and that has the work W placed thereon; an imaging partthat images an image in which the combined wave is formed; a reference mirror adjustment mechanism () that adjusts a posture of the reference mirror; and a control part that controls the reference mirror adjustment mechanism such that a reflecting surface of the reference mirrorcorresponds to a measurement surface of the work W, based on an image imaged in a condition where a work W is placed on the stage.