The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2017
Filed:
Jun. 12, 2015
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Xing Lin, San Jose, CA (US);
Bozhi Yang, Santa Clara, CA (US);
Jianhua Zhou, Campbell, CA (US);
Dale R. Dubois, Los Gatos, CA (US);
Juan Carlos Rocha-Alvarez, San Carlos, CA (US);
Ramprakash Sankarakrishnan, Santa Clara, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/458 (2006.01); H01L 21/687 (2006.01); H01L 21/67 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4586 (2013.01); H01J 37/32577 (2013.01); H01J 37/32724 (2013.01); H01L 21/67103 (2013.01); H01L 21/67109 (2013.01); H01L 21/68792 (2013.01);
Abstract
A method and apparatus for a heated pedestal is provided. In one embodiment, the heated pedestal includes a body comprising a ceramic material, a plurality of heating elements encapsulated within the body, and one or more grooves formed in a surface of the body adjacent each of the plurality of heating elements, at least one side of the grooves being bounded by a ceramic plate.