The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 01, 2017

Filed:

May. 20, 2016
Applicant:

Infineon Technologies Austria Ag, Villach, AT;

Inventors:

Armin Willmeroth, Augsburg, DE;

Franz Hirler, Isen, DE;

Hans-Joachim Schulze, Taufkirchen, DE;

Uwe Wahl, Munich, DE;

Winfried Kaindl, Unterhaching, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 21/322 (2006.01); H01L 29/739 (2006.01); H01L 29/10 (2006.01); H01L 29/417 (2006.01); H01L 29/45 (2006.01); H01L 29/861 (2006.01); H01L 29/32 (2006.01); H01L 29/08 (2006.01); H01L 29/165 (2006.01); H01L 21/304 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0634 (2013.01); H01L 21/3223 (2013.01); H01L 29/0696 (2013.01); H01L 29/1095 (2013.01); H01L 29/41741 (2013.01); H01L 29/45 (2013.01); H01L 29/66333 (2013.01); H01L 29/66712 (2013.01); H01L 29/7395 (2013.01); H01L 29/7802 (2013.01); H01L 29/7811 (2013.01); H01L 29/861 (2013.01); H01L 21/304 (2013.01); H01L 21/30604 (2013.01); H01L 29/0653 (2013.01); H01L 29/0834 (2013.01); H01L 29/0878 (2013.01); H01L 29/165 (2013.01); H01L 29/32 (2013.01);
Abstract

A super junction semiconductor device includes a semiconductor portion with first and second surfaces parallel to one another and including a doped layer of a first conductivity type formed at least in a cell area. Columnar first super junction regions of a second conductivity type extend in a direction perpendicular to the first surface and are separated by columnar second super junction regions of the first conductivity type. The first and second super junction regions form a super junction structure between the first surface and the doped layer. A first electrode structure directly adjoins the first surface and a second electrode structure directly adjoins the second surface. The first electrode structure has a first thickness and the second electrode structure has a second thickness. A sum of the first and second thicknesses is at least 20% of the thickness of the semiconductor portion between the first and second surfaces.


Find Patent Forward Citations

Loading…