The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2017
Filed:
Nov. 11, 2010
Akihiro Nakauchi, Utsunomiya, JP;
Akihiro Nakauchi, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
The present invention provides a method of measuring a shape of a surface of an object, the method including obtaining shape data for each of a plurality of regions on the surface by a surface measurement for each of the plurality of regions, each of the plurality of regions having a region overlapping another of the plurality of regions, obtaining an error of the surface measurements so as to minimize a difference in shape with respect to the overlapping regions based on the obtained shape data, and obtaining the shape of the surface based on the obtained shape data and the obtained error, wherein the shape data is obtained so as not to include a component having a spatial frequency higher than a threshold determined based on a required precision.