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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9718672 B1

PDFFull Text
Date of Patent:
Aug. 01, 2017

Filed:

Dec. 30, 2015

Electronic devices including substantially hermetically sealed cavities and getter films with kelvin measurement arrangement for evaluating the getter films and methods for fabricating the same

Applicant:

Globalfoundries Singapore Pte. Ltd., Singapore, SG;

Inventors:

Szu Huat Goh, Singapore, SG;

Edy Susanto, Singapore, SG;

Jeffrey Lam, Singapore, SG;

Assignee:

GLOBALFOUNDRIES SINGAPORE PTE. LTD., Singapore, SG;

Attorney:

Lorenz & Kopf, LLP

Primary Examiner:

Dung Le

Int. Cl.
CPC ...
B81B 7/00 (2006.01);
U.S. Cl.
CPC ...
B81B 7/0038 (2013.01);
Abstract

Electronic devices and methods for fabricating electronic devices are provided. In one example, an electronic device includes an electronic device body structure having a substantially hermetically sealed cavity formed therein. A getter film is in fluid communication with the substantially hermetically sealed cavity. Conductive features are accessible from outside the substantially hermetically sealed cavity and are operatively coupled to the getter film for electrical communication with the getter film.

Find Patent Forward Citations

Goh, Szu. (2017). Electronic devices including substantially hermetically sealed cavities and getter films with kelvin measurement arrangement for evaluating the getter films and methods for fabricating the same (U.S. Patent No. 9718672). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9718672

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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