The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 25, 2017

Filed:

Jun. 20, 2012
Applicants:

Fabrice Lallement, Bernin, FR;

Christophe Figuet, Crolles, FR;

Daniel Delprat, Crolles, FR;

Inventors:

Fabrice Lallement, Bernin, FR;

Christophe Figuet, Crolles, FR;

Daniel Delprat, Crolles, FR;

Assignee:

SOITEC, Bernin, FR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/30 (2006.01); H01L 21/70 (2006.01); H01L 21/762 (2006.01); H01L 21/46 (2006.01); H01L 21/304 (2006.01); H01L 21/322 (2006.01); H01L 29/267 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76254 (2013.01); H01L 29/267 (2013.01);
Abstract

A method for transferring a layer of semiconductor by providing a donor substrate that includes a useful layer of a semiconductor material, a confinement structure that includes a confinement layer of a semiconductor material having a chemical composition that is different than that of the useful layer, and two protective layers of semiconductor material that are distinct from the confinement layer with the protective layers being arranged on both sides of the confinement layer; introducing ions into a donor substrate, bonding the donor substrate to a receiver substrate, subjecting the donor and receiver substrates to a heat treatment that provides an increase in temperature during which the confinement layer attracts the ions in order to concentrate them in the confinement layer, and detaching the donor substrate from the receiver substrate by breaking the confinement layer.


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