The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 25, 2017
Filed:
Oct. 30, 2013
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Johan Frederik Dijksman, Weert, NL;
Ramin Badie, Eindhoven, NL;
Ronald Johannes Hultermans, Waalre, NL;
Dzmitry Labetski, Utrecht, NL;
Assignee:
ASML NETHERLANDS B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01); G03F 7/20 (2006.01); H05G 2/00 (2006.01); B05B 17/06 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70033 (2013.01); B05B 17/06 (2013.01); H05G 2/005 (2013.01); H05G 2/006 (2013.01); H05G 2/008 (2013.01);
Abstract
A droplet generator, for an EUV radiation source, comprises: a capillary in which, in use, molten material flows; an actuator configured to modulate a pressure inside the capillary; and a controller configured to drive the actuator at a driving frequency; wherein the droplet generator is arranged such that, in use, the driving frequency is equal or about equal to a main resonance frequency of the molten material in the capillary.