The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 25, 2017

Filed:

Mar. 13, 2013
Applicant:

Mks Instruments, Inc., Andover, MA (US);

Inventors:

Gerardo A. Brucker, Longmont, CO (US);

Timothy C. Swinney, Fort Collins, CO (US);

G. Jeffery Rathbone, Longmont, CO (US);

Assignee:

MKS Instruments, Inc., Andover, MA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 27/64 (2006.01); G01N 27/60 (2006.01); H01J 49/06 (2006.01); H01J 49/42 (2006.01); G01N 1/40 (2006.01); H01J 49/16 (2006.01);
U.S. Cl.
CPC ...
G01N 27/64 (2013.01); G01N 1/405 (2013.01); G01N 27/60 (2013.01); H01J 49/06 (2013.01); H01J 49/4245 (2013.01); H01J 49/162 (2013.01);
Abstract

A method of detecting specific gas species in an ion trap, the specific gas species initially being a trace component of a first low concentration in the volume of gas, includes ionizing the gas including the specific gas species, thereby creating specific ion species. The method further includes producing an electrostatic potential in which the specific ion species are confined in the ion trap to trajectories. The method also includes exciting confined specific ion species with an AC excitation source having an excitation frequency, scanning the excitation frequency of the AC excitation source to eject the specific ion species from the ion trap, and detecting the ejected specific ion species. The method further includes increasing the concentration of the specific ion species within the ion trap relative to the first low concentration prior to scanning the excitation frequency that ejects the ions of the specific gas species.


Find Patent Forward Citations

Loading…