The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2017
Filed:
Jun. 30, 2011
Masaru Hori, Nagoya, JP;
Hiroyuki Kano, Miyoshi, JP;
Tetsunori Kawasumi, Nagoya, JP;
Naofumi Yoshida, Obu, JP;
Akihiro Kawajiri, Chiryu, JP;
Toshimitsu Watanabe, Chiryu, JP;
Joji Isozumi, Nagakute, JP;
Masaru Hori, Nagoya, JP;
Hiroyuki Kano, Miyoshi, JP;
Tetsunori Kawasumi, Nagoya, JP;
Naofumi Yoshida, Obu, JP;
Akihiro Kawajiri, Chiryu, JP;
Toshimitsu Watanabe, Chiryu, JP;
Joji Isozumi, Nagakute, JP;
FUJI MACHINE MFG. CO., LTD., Chiryu-shi, JP;
NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY, Nagoya, JP;
Abstract
A reactive-species supply device is configured to supply a treatment gas to an electric discharge space, for thereby supplying at least a reactive species formed in a plasma, to an object. The reactive-species supply device includes (a) at least one pair of electrodes configured to form the electric discharge space and (b) an electrode protection device configured to protect the electrodes from the treatment gas. Also disclosed is a surface treatment apparatus that includes the reactive-species supply device.