The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 18, 2017

Filed:

Feb. 19, 2016
Applicant:

Kabushiki Kaisha Toshiba, Minato-ku, JP;

Inventors:

Kotaro Noda, Yokkaichi, JP;

Natsuki Kikuchi, Nagoya, JP;

Masaru Kito, Kuwana, JP;

Assignee:

Kabushiki Kaisha Toshiba, Minato-ku, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/115 (2017.01); H01L 27/11582 (2017.01); H01L 29/45 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11582 (2013.01); H01L 29/456 (2013.01);
Abstract

According to one embodiment, a semiconductor memory device includes a substrate, a stacked body, and a columnar part. The stacked body is provided on the substrate. The stacked body includes a plurality of first insulating films and a plurality of electrode films alternately stacked one layer by one layer. The columnar part includes a semiconductor pillar provided in the stacked body and extending in a stacking direction of the stacked body, and a memory film provided between the semiconductor pillar and the stacked body. The electrode films include a first portion provided on a side part of the columnar part, a second part contacting the first portion and provided further outside the columnar part, and a first conductive layer covering an upper surface and a lower surface of the first portion.


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