The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 18, 2017

Filed:

Nov. 21, 2013
Applicants:

Shin-etsu Polymer Co., Ltd., Tokyo, JP;

Miraial Co., Ltd., Tokyo, JP;

Inventors:

Kazumasa Ohnuki, Saitama, JP;

Hiroyuki Shida, Saitama, JP;

Hiroki Yamagishi, Saitama, JP;

Tsuyoshi Nagashima, Tokyo, JP;

Shuichi Inoue, Tokyo, JP;

Chiaki Matsutori, Tokyo, JP;

Takaharu Oyama, Tokyo, JP;

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65D 85/30 (2006.01); H01L 21/673 (2006.01); B65D 43/22 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67373 (2013.01); B65D 43/22 (2013.01); H01L 21/67376 (2013.01); H01L 21/67386 (2013.01); Y10S 206/832 (2013.01);
Abstract

The substrate storage container includes: a container body for storing a semiconductor wafer; a lid body for opening and closing a front of the container body; and a locking mechanism for locking the lid body that has closed the front of the container body. The lid body is formed of a lid main body to be fitted to the front of the container body and a cover plate for covering a front face of the lid main body. The locking mechanism includes a rotating operation portion that is pivotally supported by the lid main body and rotationally operated from an outside of the cover plate. A plurality of posture control members for the rotating operation portions are provided for, at least, the cover plate, among the cover plate and the rotating operation portion.


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