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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9708508 B1

PDFFull Text
Expired
Date of Patent:
Jul. 18, 2017

Filed:

Jun. 08, 2015

Slurry for chemical-mechanical polishing of metals and use thereof

Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Graham M. Bates, Waterbury, VT (US);

Michael T. Brigham, Bolton, VT (US);

Joseph K. Comeau, Alburgh, VT (US);

Jason P. Ritter, Jericho, VT (US);

Matthew T. Tiersch, Essex Junction, VT (US);

Eva A. Shah, Essex Junction, VT (US);

Eric J. White, Charlotte, VT (US);

Assignee:

GLOBALFOUNDRIES Inc., Grand Cayman, KY;

Attorneys:

Thompson Hine LLP

Anthony Canale

Primary Examiner:

Gregory Webb

Int. Cl.
CPC ...
H01L 21/461 (2006.01); C09G 1/04 (2006.01); H01L 21/321 (2006.01); C09G 1/02 (2006.01); C09K 3/14 (2006.01); H01L 21/768 (2006.01); C11D 11/00 (2006.01);
U.S. Cl.
CPC ...
C09G 1/04 (2013.01); C09G 1/02 (2013.01); C09K 3/1463 (2013.01); C09K 3/1472 (2013.01); H01L 21/3212 (2013.01); H01L 21/7684 (2013.01); C11D 11/0047 (2013.01);
Abstract

A composition and a method for chemical mechanical polishing. The composition includes a surfactant anion an alkyl alcohol and a diluent. The composition further includes abrasive particles and an oxidizer. The method includes providing the composition on a surface to be polished and polishing the surface by contacting the surface with a polishing pad.

Find Patent Forward Citations

Bates, Graham. (2017). Slurry for chemical-mechanical polishing of metals and use thereof (U.S. Patent No. 9708508). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9708508

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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