The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2017
Filed:
Jun. 08, 2015
Applicant:
Globalfoundries Inc., Grand Cayman, KY;
Inventors:
Graham M. Bates, Waterbury, VT (US);
Michael T. Brigham, Bolton, VT (US);
Joseph K. Comeau, Alburgh, VT (US);
Jason P. Ritter, Jericho, VT (US);
Matthew T. Tiersch, Essex Junction, VT (US);
Eva A. Shah, Essex Junction, VT (US);
Eric J. White, Charlotte, VT (US);
Assignee:
GLOBALFOUNDRIES Inc., Grand Cayman, KY;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/461 (2006.01); C09G 1/04 (2006.01); H01L 21/321 (2006.01); C09G 1/02 (2006.01); C09K 3/14 (2006.01); H01L 21/768 (2006.01); C11D 11/00 (2006.01);
U.S. Cl.
CPC ...
C09G 1/04 (2013.01); C09G 1/02 (2013.01); C09K 3/1463 (2013.01); C09K 3/1472 (2013.01); H01L 21/3212 (2013.01); H01L 21/7684 (2013.01); C11D 11/0047 (2013.01);
Abstract
A composition and a method for chemical mechanical polishing. The composition includes a surfactant anion an alkyl alcohol and a diluent. The composition further includes abrasive particles and an oxidizer. The method includes providing the composition on a surface to be polished and polishing the surface by contacting the surface with a polishing pad.