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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9704367 B1

PDFFull Text
Expired
Date of Patent:
Jul. 11, 2017

Filed:

Jan. 06, 2015

Clean-room monitoring device and method for monitoring clean-room

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Atsushi Suzuki, Sapporo, JP;

Kazuya Uoyama, Nirasaki, JP;

Yoshitaka Konishi, Sapporo, JP;

Daisuke Oku, Sapporo, JP;

Yoshitada Honda, Sapporo, JP;

Assignee:

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorneys:

Nath, Goldberg & Meyer

Jerald L. Meyer

Primary Examiner:

Sath V Perungavoor

Assistant Examiner:

Peet Dhillon

Int. Cl.
CPC ...
H04N 7/18 (2006.01); G08B 21/02 (2006.01); F16P 3/14 (2006.01); G08B 21/22 (2006.01);
U.S. Cl.
CPC ...
G08B 21/02 (2013.01); F16P 3/142 (2013.01); G08B 21/22 (2013.01); H04N 7/183 (2013.01);
Abstract

A clean-room monitoring device for monitoring the interior of a clean-room having a floor in which a removable cover such as a grating or a non-porous cover is disposed, includes: a monitoring camera which captures an image of the removable cover; a monitor which detects the existence of an opening exposed when the removable cover is removed, based on an image signal obtained from the monitoring camera, detects the presence of a workman approaching the opening if it is detected that the opening exists, and outputs a warning signal if the workman is detected; and a warning generator which receives the warning signal from monitor and issues a warning.

Find Patent Forward Citations

Suzuki, Atsushi. (2017). Clean-room monitoring device and method for monitoring clean-room (U.S. Patent No. 9704367). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9704367

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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