The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 11, 2017

Filed:

Dec. 19, 2012
Applicant:

Gtat Corporation, Merrimack, NH (US);

Inventors:

Wenjun Qin, Missoula, MT (US);

Chad Fero, Missoula, MT (US);

Aaron Dean Rhodes, Missoula, MT (US);

Jeffrey C. Gum, Stevensville, MT (US);

Assignee:

Other;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/50 (2006.01); C23C 16/00 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01); C01B 33/035 (2006.01); C23C 16/24 (2006.01); C23C 16/44 (2006.01);
U.S. Cl.
CPC ...
C01B 33/035 (2013.01); C23C 16/24 (2013.01); C23C 16/4418 (2013.01);
Abstract

In various embodiments, systems, methods, and apparatus are provided for stabilizing filaments in a chemical vapor deposition (CVD) reactor system. A system includes a base plate having a plurality of electrical connections, a pair of filaments extending from the base plate, and a stabilizer connecting the pair of filaments. Each filament is in electrical contact with, and defines a conductive path between, the two electrical connections. A method of stabilizing the filaments includes providing the pair of filaments, and connecting the pair of filaments with at least one stabilizer. The stabilizer may include an electrically insulating material.


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