The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 04, 2017

Filed:

Mar. 16, 2016
Applicant:

Infineon Technologies Ag, Neubiberg, DE;

Inventors:

Hans-Joachim Schulze, Taufkirchen, DE;

Manfred Kotek, Villach, AT;

Johannes Baumgartl, Riegersdorf, AT;

Markus Harfmann, Villach, AT;

Christian Krenn, Viktring, AT;

Thomas Neidhart, Klagenfurt, AT;

Assignee:

Infineon Technologies AG, Neubiberg, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 29/06 (2006.01); H01L 29/161 (2006.01); H01L 29/167 (2006.01); H01L 29/207 (2006.01); H01L 21/225 (2006.01); H01L 21/683 (2006.01); H01L 29/10 (2006.01); H01L 21/324 (2006.01); H01L 29/08 (2006.01); H01L 29/16 (2006.01); H01L 29/20 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66712 (2013.01); H01L 21/2251 (2013.01); H01L 21/6835 (2013.01); H01L 29/0634 (2013.01); H01L 29/0873 (2013.01); H01L 29/1095 (2013.01); H01L 29/161 (2013.01); H01L 29/167 (2013.01); H01L 29/207 (2013.01); H01L 29/7802 (2013.01); H01L 21/3247 (2013.01); H01L 29/0878 (2013.01); H01L 29/1608 (2013.01); H01L 29/2003 (2013.01); H01L 2221/68345 (2013.01);
Abstract

A semiconductor arrangement is produced by providing a semiconductor carrier of a second conduction type and epitaxially growing a first semiconductor zone of a first conduction type on the carrier. The first semiconductor zone includes a semiconductor base material doped with first and second dopants which are made of different substances which are both different from the semiconductor base material. The first dopant is electrically active and causes a doping of the first conduction type in the semiconductor base material, and causes a decrease or an increase of a lattice constant of the first semiconductor zone. The second dopant causes one or both of hardening of the first semiconductor zone and an increase of the lattice constant of the first semiconductor zone if the first dopant causes a decrease, or a decrease of the lattice constant of the first semiconductor zone if the first dopant causes an increase.


Find Patent Forward Citations

Loading…