The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2017
Filed:
Sep. 05, 2014
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Peter Huber, Holzschwang, DE;
Gisela Von Blanckenhagen, Aalen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
A mirror () for the EUV wavelength range having a reflectivity of greater than 40% for at least one angle of incidence of between 0° and 25° includes a substrate (S) and a layer arrangement, wherein the layer arrangement has at least one non-metallic individual layer (B, H, M), and wherein the non-metallic individual layer (B, H, M) has a doping with impurity atoms of between 10 ppb and 10%, in particular between 100 ppb and 0.1%, providing the non-metallic individual layer (B, H, M) with a charge carrier density of greater than 6*10cmand/or an electrical conductivity of greater than 1*10S/m, in particular with a charge carrier density of greater than 6*10cmand/or an electrical conductivity of greater than 1 S/m.