The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2017
Filed:
Mar. 29, 2016
Applicant:
Oxford Instruments Afm Inc, Goleta, CA (US);
Inventors:
Roger B Proksch, Goleta, CA (US);
Jason Bemis, Goleta, CA (US);
Assignee:
Oxford Instruments AFM Inc., Goleta, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 60/32 (2010.01); G01B 17/08 (2006.01); G01Q 10/00 (2010.01); B82Y 35/00 (2011.01);
U.S. Cl.
CPC ...
G01Q 60/32 (2013.01); B82Y 35/00 (2013.01); G01B 17/08 (2013.01); G01Q 10/00 (2013.01);
Abstract
The imaging mode presented here combines the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the second resonant drive frequency operates in FM mode and is adjusted to keep the phase at 90 degrees, on resonance. With this approach, frequency feedback on the second resonant mode and topographic feedback on the first are decoupled, allowing much more stable, robust operation.