The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2017
Filed:
Jun. 13, 2013
Applicant:
Oc Oerlikon Balzers Ag, Balzers, LI;
Inventors:
Assignee:
EVATEC AG, Trübbach, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); B65G 49/00 (2006.01); B25J 15/06 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
B65G 49/00 (2013.01); B25J 15/0608 (2013.01); H01L 21/67346 (2013.01); H01L 21/67709 (2013.01);
Abstract
A transport and handing-over arrangement for disc shaped substrates, comprising a carrier () and a take-over arrangement (). Both are moveable relative to each other. A relatively heavy substrate carrier () of magnetizable material is taken-over from the take-over arrangement () by distance control of a permanent magnet () at the take-over arrangement () or is returned therefrom to a carrier (). The controlled drive of the permanent magnets () in the take-over arrangement () is performed by means of pneumatic piston/cylinder arrangements ().