The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2017
Filed:
Feb. 08, 2013
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
Abneesh Srivastava, Amherst, NY (US);
Thomas Richard Gaffney, Carlsbad, CA (US);
Joshua T. Cook, Encinitas, CA (US);
Peter K. Shogren, Chula Vista, CA (US);
Daimhin Paul Murphy, San Diego, CA (US);
Stenio da Costa Pereira, San Diego, CA (US);
Assignee:
Entegris, Inc., Billerica, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B01D 53/86 (2006.01); C01B 21/04 (2006.01); C01B 3/56 (2006.01); C01B 3/58 (2006.01); C01B 23/00 (2006.01); B01D 53/28 (2006.01); B01D 53/75 (2006.01); B01J 29/14 (2006.01); B01D 53/26 (2006.01);
U.S. Cl.
CPC ...
B01D 53/869 (2013.01); B01D 53/28 (2013.01); B01D 53/75 (2013.01); B01D 53/8671 (2013.01); B01J 29/143 (2013.01); C01B 3/56 (2013.01); C01B 3/58 (2013.01); C01B 21/0422 (2013.01); C01B 23/0026 (2013.01); B01D 53/261 (2013.01); B01D 2253/108 (2013.01); B01D 2255/20753 (2013.01); B01D 2255/50 (2013.01); B01D 2256/10 (2013.01); B01D 2257/104 (2013.01); B01D 2257/80 (2013.01); C01B 2203/042 (2013.01); C01B 2203/0435 (2013.01); C01B 2203/0465 (2013.01); C01B 2203/0495 (2013.01); C01B 2203/146 (2013.01); C01B 2210/0031 (2013.01); C01B 2210/0034 (2013.01); C01B 2210/0042 (2013.01); C01B 2210/0045 (2013.01); C01B 2210/0062 (2013.01);
Abstract
The invention relates to a gas purifier that removes moisture and oxygen from inert gases and reducing gases, for example, at sub-atmospheric pressures. The purifier can remove part per million levels of moisture in a gas stream to less than 100 parts per trillion by volume, and has a low pressure drop and a sharp breakthrough curve.