The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2017
Filed:
Dec. 22, 2011
Applicants:
Akinori Koukitu, Tokyo, JP;
Yoshinao Kumagai, Tokyo, JP;
Toru Nagashima, Yamaguchi, JP;
Yuki Hiraren, Yamaguchi, JP;
Inventors:
Akinori Koukitu, Tokyo, JP;
Yoshinao Kumagai, Tokyo, JP;
Toru Nagashima, Yamaguchi, JP;
Yuki Hiraren, Yamaguchi, JP;
Assignees:
National University Corporation Tokyo University of Agriculture and Technology, Tokyo, JP;
Tokuyama Corporation, Yamaguchi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 25/02 (2006.01); H01L 33/34 (2010.01); C30B 25/08 (2006.01); H01L 21/02 (2006.01); C30B 29/40 (2006.01); H01L 33/00 (2010.01); C30B 23/00 (2006.01);
U.S. Cl.
CPC ...
H01L 33/343 (2013.01); C30B 25/02 (2013.01); C30B 25/08 (2013.01); C30B 29/403 (2013.01); H01L 21/0254 (2013.01); H01L 33/0054 (2013.01); C30B 23/00 (2013.01);
Abstract
The present invention relates to a single-crystalline aluminum nitride wherein a carbon concentration is 1×10atoms/cmor more and less than 3×10atoms/cm, a chlorine concentration is 1×10to 1×10atoms/cm, and an absorption coefficient at 265 nm wavelength is 40 cmor less.