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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9691942 B1

PDFFull Text
Date of Patent:
Jun. 27, 2017

Filed:

Dec. 22, 2011

Single-cystalline aluminum nitride substrate and a manufacturing method thereof

Applicants:

Akinori Koukitu, Tokyo, JP;

Yoshinao Kumagai, Tokyo, JP;

Toru Nagashima, Yamaguchi, JP;

Yuki Hiraren, Yamaguchi, JP;

Inventors:

Akinori Koukitu, Tokyo, JP;

Yoshinao Kumagai, Tokyo, JP;

Toru Nagashima, Yamaguchi, JP;

Yuki Hiraren, Yamaguchi, JP;

Assignees:

National University Corporation Tokyo University of Agriculture and Technology, Tokyo, JP;

Tokuyama Corporation, Yamaguchi, JP;

Attorney:

Cahn & Samuels, LLP

Primary Examiner:

Matthew Song

Int. Cl.
CPC ...
C30B 25/02 (2006.01); H01L 33/34 (2010.01); C30B 25/08 (2006.01); H01L 21/02 (2006.01); C30B 29/40 (2006.01); H01L 33/00 (2010.01); C30B 23/00 (2006.01);
U.S. Cl.
CPC ...
H01L 33/343 (2013.01); C30B 25/02 (2013.01); C30B 25/08 (2013.01); C30B 29/403 (2013.01); H01L 21/0254 (2013.01); H01L 33/0054 (2013.01); C30B 23/00 (2013.01);
Abstract

The present invention relates to a single-crystalline aluminum nitride wherein a carbon concentration is 1×10atoms/cmor more and less than 3×10atoms/cm, a chlorine concentration is 1×10to 1×10atoms/cm, and an absorption coefficient at 265 nm wavelength is 40 cmor less.

Find Patent Forward Citations

Koukitu, Akinori. (2017). Single-cystalline aluminum nitride substrate and a manufacturing method thereof (U.S. Patent No. 9691942). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9691942

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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