The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 27, 2017

Filed:

Oct. 13, 2010
Applicants:

Harry Atwater, South Pasadena, CA (US);

Brendan Kayes, Santa Clara, CA (US);

Isik C. Kizilyalli, San Francisco, CA (US);

Hui Nie, Santa Clara, CA (US);

Inventors:

Harry Atwater, South Pasadena, CA (US);

Brendan Kayes, Santa Clara, CA (US);

Isik C. Kizilyalli, San Francisco, CA (US);

Hui Nie, Santa Clara, CA (US);

Assignee:

ALTA DEVICES, INC., Sunnyvale, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/00 (2006.01); H01L 21/00 (2006.01); H01L 31/0232 (2014.01); H01L 31/056 (2014.01); H01L 31/0304 (2006.01); H01L 31/0236 (2006.01); H01L 31/18 (2006.01); H01L 31/20 (2006.01); H01L 31/0693 (2012.01);
U.S. Cl.
CPC ...
H01L 31/02327 (2013.01); H01L 31/0236 (2013.01); H01L 31/02366 (2013.01); H01L 31/0304 (2013.01); H01L 31/03046 (2013.01); H01L 31/056 (2014.12); H01L 31/0693 (2013.01); H01L 31/18 (2013.01); H01L 31/184 (2013.01); H01L 31/1844 (2013.01); H01L 31/1852 (2013.01); H01L 31/208 (2013.01); Y02E 10/50 (2013.01); Y02E 10/544 (2013.01);
Abstract

Embodiments of the invention generally relate to device fabrication of thin films used as solar devices or other electronic devices, and include textured back reflectors utilized in solar applications. In one embodiment, a method for forming a textured metallic back reflector which includes depositing a metallic layer on a gallium arsenide material within a thin film stack, forming an array of metallic islands from the metallic layer during an annealing process, removing or etching material from the gallium arsenide material to form apertures between the metallic islands, and depositing a metallic reflector layer to fill the apertures and cover the metallic islands. In another embodiment, a textured metallic back reflector includes an array of metallic islands disposed on a gallium arsenide material, a plurality of apertures disposed between the metallic islands and extending into the gallium arsenide material, a metallic reflector layer disposed over the metallic islands, and a plurality of reflector protrusions formed between the metallic islands and extending from the metallic reflector layer and into the apertures formed in the gallium arsenide material.


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