The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 27, 2017

Filed:

Aug. 28, 2014
Applicant:

United Microelectronics Corp., Hsin-Chu, TW;

Inventors:

Tse-Min Chao, Taichung, TW;

Tzu-Yun Chang, Hsin-Chu Hsien, TW;

Hsueh-Chun Hsiao, Hsinchu County, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 22/34 (2013.01);
Abstract

The present invention provides a test key array including a lower conductive pattern, and the lower conductive pattern includes a plurality of first L-shaped traces parallel to each other, an upper conductive pattern, where the upper conductive pattern includes a plurality of second L-shaped traces parallel to each other, the lower conductive pattern crosses to the upper conductive pattern, and a plurality of cross regions are defined between the lower conductive pattern and the upper conductive pattern, and a plurality of conductive plugs, disposed on parts of the cross regions, electrically connecting to the lower conductive pattern and the upper conductive pattern.


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