The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 27, 2017

Filed:

Jul. 24, 2015
Applicant:

Semiconductor Manufacturing International (Shanghai) Corporation, Shanghai, CN;

Inventors:

Yong Cheng, Shanghai, CN;

Xianyong Pu, Shanghai, CN;

Haiqiang Wang, Shanghai, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 21/02 (2006.01); H01L 29/78 (2006.01); H01L 29/06 (2006.01); H01L 21/762 (2006.01); H01L 29/08 (2006.01); H01L 21/265 (2006.01); H01L 29/10 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02164 (2013.01); H01L 21/76224 (2013.01); H01L 29/0653 (2013.01); H01L 29/0847 (2013.01); H01L 29/66659 (2013.01); H01L 29/7835 (2013.01); H01L 21/26513 (2013.01); H01L 21/26586 (2013.01); H01L 29/1045 (2013.01);
Abstract

A LDMOS transistor includes a semiconductor substrate with a first doping type; a plurality of first trenches formed in the semiconductor substrate; a wave-shaped drift region with an increased conductive path and a second doping type formed on the semiconductor substrate between adjacent first trenches and the semiconductor substrate exposed by side and bottom surfaces of the first trenches; a first shallow trench isolation (STI) structure formed in each of the first trenches; a body region with the first doping type formed in semiconductor substrate at one side of the drift region; a gate structure formed over portions of the body region, the drift region and the first STI structure most close to the body region; a source region formed in the body region; and a drain region formed in the drift region at one side of the first STI structure most far away from the body region.


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