The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2017
Filed:
Jun. 25, 2015
Applicant:
Globalfoundries Inc., Grand Cayman, KY;
Inventors:
Ioana C. Graur, Poughkeepsie, NY (US);
Ian P. Stobert, Hopewell Junction, NY (US);
Dmitry A. Vengertsev, Beacon, NY (US);
Assignee:
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01); G03F 1/36 (2012.01);
U.S. Cl.
CPC ...
G06F 17/5081 (2013.01); G03F 1/36 (2013.01); G06F 17/5077 (2013.01); G06F 17/5068 (2013.01);
Abstract
Candidate layout patterns can be generated using a generative model trained based on known data, such as historical hot spot data, features extraction, and geometrical primitives. The generative model can be sampled to obtain candidate layouts that can be ranked and repaired using error optimization, design rule checking, optical proximity checking, and other methods to ensure that resulting candidates are manufacturable.