The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2017
Filed:
May. 31, 2013
Tokyo Electron Limited, Tokyo, JP;
Hiroshi Yamada, Nirasaki, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A wafer inspection interfaceincludes a probe cardincluding probesprovided on a surface facing a wafer W; a pogo framethat supports a surface of the probe cardopposite to the surface on which the probesare provided; a table-shaped chuck memberfacing the probe cardwith the wafer W therebetween; a cylindrical bellows, configured to seal a space between the chuck memberand the pogo frame, having one end fastened to the pogo frameand a lower flangeat the other end to be contacted with the chuck member; a length adjusting device that adjusts a length of the bellows; a guide memberthat guides a movement of the bellows; and a decompression paththat decompresses the space between the chuck memberand the pogo frame