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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9685387 B1

PDFFull Text
Date of Patent:
Jun. 20, 2017

Filed:

Jun. 16, 2016

Test key for checking the window of a doped region and method of using the test key

Applicant:

United Microelectronics Corp., Hsin-Chu, TW;

Inventors:

Zhe Wang, Singapore, SG;

Ching Hwa Tey, Singapore, SG;

Lu Zou, Singapore, SG;

Assignee:

UNITED MICROELECTRONICS CORP., Hsin-Chu, TW;

Attorney:

Winston Hsu

Primary Examiner:

Jack Chen

Int. Cl.
CPC ...
H01L 23/58 (2006.01); H01L 21/66 (2006.01); H01L 27/092 (2006.01); H01L 29/06 (2006.01); H01L 21/8238 (2006.01); G01R 31/26 (2014.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
H01L 22/34 (2013.01); G01R 31/2644 (2013.01); G01R 31/2884 (2013.01); H01L 21/823878 (2013.01); H01L 21/823892 (2013.01); H01L 22/30 (2013.01); H01L 27/0928 (2013.01); H01L 29/0653 (2013.01);
Abstract

A test key and a method for checking the window of a doped region using the test key are provided in the present invention. The test key includes a P-type first well region on a substrate, a P-type substrate region adjacent to the first well region, a N-type first doped region partially overlapping the first well region, two P-type second doped regions at two opposite sides of the first well region, a N-type second well region surrounding the first doped region, the substrate region and the two second doped regions, and a plurality of test pads above the above-identified region.

Find Patent Forward Citations

Wang, Zhe. (2017). Test key for checking the window of a doped region and method of using the test key (U.S. Patent No. 9685387). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9685387

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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