The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 20, 2017
Filed:
Jan. 30, 2015
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Daniel O. Clark, Pleasanton, CA (US);
Phil Chandler, San Francisco, CA (US);
Jay J. Jung, Sunnyvale, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); C23C 14/56 (2006.01); B01D 53/74 (2006.01); C23C 16/44 (2006.01); B01D 53/38 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67017 (2013.01); B01D 53/38 (2013.01); B01D 53/74 (2013.01); C23C 14/56 (2013.01); C23C 16/4412 (2013.01); Y10T 137/0318 (2015.04); Y10T 137/0419 (2015.04);
Abstract
An electronic device manufacturing system is provided that may reduce the amount of resources used in electronic device manufacturing processes. In some embodiments, unreacted ozone exiting a process tool operating in an ozone mode may be diverted and used as an oxidant in an abatement tool when the process tool is operating in a non-ozone mode. Numerous other embodiments are provided.