The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9684053 B1

PDF
Full Text
Expired
Date of Patent:
Jun. 20, 2017

Filed:

Feb. 20, 2015
Applicant:

Advantest Corporation, Tokyo, JP;

Inventor:

Tetsuya Kuitani, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 35/00 (2006.01);
U.S. Cl.
CPC ...
G01R 35/00 (2013.01);
Abstract

To test a probe card with an examination apparatus that tests a device under test, provided is a test system that tests a device under test and includes a test section that includes a plurality of test units that input or output a signal; a probe card that includes a plurality of probe terminals connected to a terminal of the device under test, and transmits signals between the device under test and the test section; and a wafer for testing that is connected to the probe card, instead of the device under test, when testing the probe card, and includes a connection wire that electrically connects two of the probe terminals to each other. The test section measures output of at least one of two test units connected to the two probe terminals, and judges pass/fail of the two probe terminals.


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