The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2017
Filed:
Nov. 09, 2010
Libor Novak, Brno, CZ;
Marek Uncovsky, Brno, CZ;
Milos Toth, Portland, OR (US);
Martin Cafourek, Brno, CZ;
William Parker, San Jose, CA (US);
Marcus Straw, Portland, OR (US);
Mark Emerson, Hillsboro, OR (US);
Libor Novak, Brno, CZ;
Marek Uncovsky, Brno, CZ;
Milos Toth, Portland, OR (US);
Martin Cafourek, Brno, CZ;
William Parker, San Jose, CA (US);
Marcus Straw, Portland, OR (US);
Mark Emerson, Hillsboro, OR (US);
FEI Company, Hillsboro, OR (US);
Abstract
An environmental cell for a charged particle beam system allows relative motion between the cell mounted on an X-Y stage and the optical axis of the focusing column, thereby eliminating the need for a sub-stage within the cell. A flexible cell configuration, such as a retractable lid, permits a variety of processes, including beam-induced and thermally-induced processes. Photoelectron yield spectroscopy performed in a charged particle beam system and using gas cascade amplification of the photoelectrons allows analysis of material in the cell and monitoring of processing in the cell. Luminescence analysis can be also performed using a retractable mirror.