The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2017
Filed:
Apr. 29, 2013
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventor:
Dietmar Schnier, Garbsen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/18 (2006.01); G03F 1/84 (2012.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70133 (2013.01); G02B 5/1861 (2013.01); G03F 1/84 (2013.01); G03F 7/70775 (2013.01);
Abstract
An irradiation module for a measuring apparatus is provided. The irradiation module is light-conductive, is configured as a cohesive body and comprises a beam-splitting surface arranged within the irradiation module for splitting an incoming measuring beam into two partial beams. Furthermore, the irradiation module comprises an optical diffraction grating for interaction with a first of the two partial beams and a reflection surface for reflecting the second partial beam.