The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2017
Filed:
May. 04, 2015
Applicant:
Stmicroelectronics International N.v., Amsterdam, NL;
Inventor:
Nir Goren, Moshav Herut, IL;
Assignee:
STMICROELECTRONICS INTERNATIONAL N.V., Schiphol, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); G02B 26/10 (2006.01); B81B 3/00 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0833 (2013.01); G02B 26/0841 (2013.01); G02B 26/10 (2013.01); G02B 26/105 (2013.01); B81B 3/0045 (2013.01);
Abstract
A micromechanical mirror includes a mobile mass carrying a mirror element and provided in a body including semiconductor material. A driving structure is coupled to the mobile mass to cause a scanning movement thereof. The driving structure is configured to generate a combination of a two or more sinusoidal resonant modes in the micromechanical mirror at respective resonant frequencies. This combination approximates a scanning pattern of the mobile mass defined by a linear function which may, in particular, be a triangular shaped function.