The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 13, 2017

Filed:

Apr. 01, 2014
Applicant:

Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);

Inventors:

Peter L. Kellerman, Essex, MA (US);

Gregory D. Thronson, Groveland, MA (US);

Dawei Sun, Nashua, NH (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 15/22 (2006.01); C30B 35/00 (2006.01); C30B 15/06 (2006.01); C30B 28/10 (2006.01); C30B 29/06 (2006.01); C30B 29/52 (2006.01); C30B 29/64 (2006.01); C30B 9/00 (2006.01); C30B 11/00 (2006.01); C30B 15/00 (2006.01); C30B 15/24 (2006.01); C30B 15/34 (2006.01);
U.S. Cl.
CPC ...
C30B 35/00 (2013.01); C30B 9/00 (2013.01); C30B 11/00 (2013.01); C30B 15/06 (2013.01); C30B 15/22 (2013.01); C30B 28/10 (2013.01); C30B 29/06 (2013.01); C30B 29/52 (2013.01); C30B 29/64 (2013.01); C30B 15/00 (2013.01); C30B 15/002 (2013.01); C30B 15/24 (2013.01); C30B 15/34 (2013.01); Y10T 117/1048 (2015.01); Y10T 117/1092 (2015.01);
Abstract

In one embodiment, a sheet production apparatus comprises a vessel configured to hold a melt of a material. A cooling plate is disposed proximate the melt and is configured to form a sheet of the material on the melt. A first gas jet is configured to direct a gas toward an edge of the vessel. A sheet of a material is translated horizontally on a surface of the melt and the sheet is removed from the melt. The first gas jet may be directed at the meniscus and may stabilize this meniscus or increase local pressure within the meniscus.


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