The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2017
Filed:
Mar. 27, 2015
Ebara Corporation, Tokyo, JP;
Yoshio Minami, Tokyo, JP;
Ebara Corporation, Tokyo, JP;
Abstract
A plating apparatus that can obtain each one of electric resistances of plural inner contacts of a substrate holder is disclosed. The plating apparatus includes a resistance-measuring device configured to measure a combined resistance of two electric contacts selected from the plural electric contacts, repeat measuring of a combined resistance of two electric contacts while changing a combination of two electric contacts until a same number of plural combined resistances as the plural electric contacts are measured, create linear equations by coupling each of the plural combined resistances to two variables with use of an equal sign, the two variables representing electric resistances of the corresponding two electric contacts, and solve the linear equations to determine each one of electric resistances of the plural electric contacts.