The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 06, 2017

Filed:

Oct. 12, 2015
Applicant:

Rf Micro Devices, Inc., Greensboro, NC (US);

Inventors:

Peter J. Zampardi, Newbury Park, CA (US);

Brian Moser, Jamestown, NC (US);

Assignee:

Qorvo US, Inc., Greensboro, NC (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); H01L 49/02 (2006.01); H01L 23/528 (2006.01); H01L 23/522 (2006.01); H01G 4/30 (2006.01);
U.S. Cl.
CPC ...
H01L 28/60 (2013.01); H01G 4/306 (2013.01); H01L 22/20 (2013.01); H01L 22/22 (2013.01); H01L 23/528 (2013.01); H01L 23/5226 (2013.01); H01L 28/87 (2013.01);
Abstract

A method of making a capacitor with reduced variance comprises providing a bottom plate in a first metal layer, a first dielectric material over the bottom plate, and a middle plate in a second metal layer to form a first capacitor. The method also comprises measuring the capacitance of the first capacitor, and determining whether to couple none, one, or both of a second capacitor and a third capacitor in parallel with the first capacitor. The method may further comprise the steps of providing a second dielectric material over the middle plate, and providing a first top plate and a second top plate in a third metal layer to form the second capacitor, and a third capacitor. Electrical connections may be formed to couple one or both of the second capacitor and the third capacitor in parallel with the first capacitor based on the measured value of the first capacitor.


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