The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2017
Filed:
Sep. 04, 2013
Applicant:
Samsung Display Co., Ltd., Yongin, KR;
Inventors:
ChangHoon Kim, Asan-si, KR;
JaeHyuk Chang, Seongnam-si, KR;
Su-Yeon Sim, Seoul, KR;
KiBeom Lee, Seoul, KR;
HiKuk Lee, Yongin-si, KR;
Sanghyun Lee, Yongin-si, KR;
Assignee:
Samsung Display Co., Ltd., Yongin-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/18 (2006.01); G03B 27/32 (2006.01); G03B 27/54 (2006.01); G03B 27/72 (2006.01); G03F 7/20 (2006.01); G02B 26/08 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70291 (2013.01); G02B 26/0808 (2013.01); G03F 7/70275 (2013.01);
Abstract
A digital exposure device including a GLV or a DMD. The digital exposure device also includes: a stage to support and move a substrate in a scan direction; an optical system disposed between the stage and the GLV or the DMD, to form a pattern on the substrate by modulating light received from the GLV or the DMD; and a control unit to control the a width of the pattern by a unit, the unit being obtained by dividing the width of the pattern by a natural number m, in the second direction.