The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2017
Filed:
Jan. 07, 2015
Tokyo Electron Limited, Tokyo, JP;
Takashi Amemiya, Nirasaki, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A wafer inspection apparatusincludes a middle platethat mounts a probe cardin which multiple contact probesare provided; a drawer type tablein which the middle plateis provided; a testerto which the probe cardis mounted; and a transfer robotthat transfers the middle plate. The middle plateincludes a baseand multiple supportsprotruding toward the probe cardto be mounted. A protruding height of each supportis equal to or higher than a protruding length of the contact probefrom the probe card. The probe cardis fastened to a probe card coverwhen the probe cardis mounted on the middle plate, and the transfer robottransfers the middle platefrom the tableto the tester