The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2017
Filed:
Feb. 16, 2012
Applicants:
Rhonda Hyndman, Maghera, GB;
Stephen Burgess, Wales, GB;
Inventors:
Rhonda Hyndman, Maghera, GB;
Stephen Burgess, Wales, GB;
Assignee:
SPTS TECHNOLOGIES LIMITED, Newport, Gwent, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/00 (2006.01); C23C 14/02 (2006.01); C23C 14/16 (2006.01); C23C 14/34 (2006.01);
U.S. Cl.
CPC ...
C23C 14/025 (2013.01); C23C 14/165 (2013.01); C23C 14/345 (2013.01);
Abstract
A method of depositing an aluminum film on a substrate includes placing the substrate on a support, depositing a first layer of aluminum onto the substrate with the substrate in an unclamped condition, clamping the substrate to the support and depositing a second layer of aluminum continuous with the first layer. The second layer is thicker than the first layer and the second layer is deposited at a substrate temperature of less than about 22° C.