The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2017
Filed:
Jun. 26, 2015
Kla-tencor Corporation, Milpitas, CA (US);
Bruno Accou, Linter, BE;
Erik De Block, Hong Kong, CN;
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A pick and place device, a method and a computer program product for automatic pick-up-height adjustment. A first pneumatic system has a first and second controllable valves. The second controllable valve is connected with its input port to a vacuum source. An output port of the first controllable valve and an output port of the second controllable valve are connected to a common tube in fluid communication with at least one vacuum nozzle of the pick and place device. A second pneumatic system, with an inlet valve and an outlet valve are in fluid communication via a connecting tube. An open air exhaust and a flow controller are arranged in the connecting tube between the inlet valve and the outlet valve. A flow sensor detects the changes of the small air flow. The flow sensor is via a tube in fluid communication with the at least one vacuum nozzle.