The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2017
Filed:
Aug. 12, 2013
Advanced Technology Materials, Inc., Danbury, CT (US);
Jeffrey J. Homan, Ladson, SC (US);
Jose I. Arno, Brookfield, CT (US);
Joseph D. Sweeney, Winsted, CT (US);
Entegris, Inc., Billerica, MA (US);
Abstract
A system () for delivery of dilute fluid, utilizing an active fluid source (), a diluent fluid source (), a fluid flow metering device () for dispensing of one of the active and diluent fluids, a mixer () arranged to mix the active and diluent fluids to form a diluted active fluid mixture, and a monitor () arranged to sense concentration of active fluid and/or diluent fluid in the diluted active fluid mixture, and responsively adjust the fluid flow metering device () to achieve a predetermined concentration of active fluid in the diluted active fluid mixture. A pressure controller () is arranged to control flow of the other of the active and diluent fluids so as to maintain a predetermined pressure of the diluted active fluid mixture dispensed from the system. The fluid dispensed from the system then can be adjustably controlled by a flow rate controller, e.g., a mass flow controller, to provide a desired flow to a fluid-utilizing unit, such as a semiconductor process tool. An end point monitoring assembly is also described, for switching fluid sources () to maintain continuity of delivery of the diluted active fluid mixture.