The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2017
Filed:
Mar. 26, 2015
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Markus Hauf, Ulm, DE;
Alexander Vogler, Aalen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01); G03F 7/20 (2006.01); G02B 7/182 (2006.01); G02B 26/08 (2006.01); G02B 7/18 (2006.01);
U.S. Cl.
CPC ...
G03F 7/702 (2013.01); G02B 7/181 (2013.01); G02B 7/182 (2013.01); G02B 7/1828 (2013.01); G02B 26/0816 (2013.01); G02B 26/0833 (2013.01); G03F 7/70075 (2013.01); G03F 7/70116 (2013.01); G03F 7/70825 (2013.01);
Abstract
The invention relates to an arrangement for actuating an element in an optical system, in particular an optical system of a projection exposure apparatus, wherein the optical element is tiltable about at least one tilting axis via at least one joint having a joint stiffness, comprising at least one actuator for exerting a force on the optical element, wherein the actuator has an actuator stiffness which at least partly compensates for the joint stiffness.