The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2017
Filed:
Jun. 22, 2015
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Ulrich Weber, Ulm, DE;
Jens Kugler, Aalen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 7/02 (2006.01); G02B 7/00 (2006.01); G02B 7/182 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G02B 7/005 (2013.01); G02B 7/003 (2013.01); G02B 7/004 (2013.01); G02B 7/02 (2013.01); G02B 7/023 (2013.01); G02B 7/1822 (2013.01); G03F 7/7015 (2013.01); G03F 7/70258 (2013.01); G03F 7/70825 (2013.01);
Abstract
The disclosure provides a positioning unit for an optical element in a microlithographic projection exposure installation having a first connecting area for connection to the optical element, and having a second connecting area for connection to an object in the vicinity of the optical element.