The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 23, 2017

Filed:

Apr. 24, 2012
Applicants:

Shoubin Zhang, Sanda, JP;

Masahiro Shoji, Sandi, JP;

Inventors:

Shoubin Zhang, Sanda, JP;

Masahiro Shoji, Sandi, JP;

Assignees:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C22C 9/00 (2006.01); C22F 1/08 (2006.01); H01L 31/18 (2006.01); H01L 31/032 (2006.01); C23C 14/34 (2006.01); C22C 1/04 (2006.01); B22F 3/15 (2006.01);
U.S. Cl.
CPC ...
H01L 31/18 (2013.01); B22F 3/15 (2013.01); C22C 1/0425 (2013.01); C22C 9/00 (2013.01); C23C 14/3414 (2013.01); H01L 31/0322 (2013.01); B22F 2999/00 (2013.01); Y02E 10/541 (2013.01); Y02P 70/521 (2015.11);
Abstract

Provided are a sputtering target that is capable of forming a Cu—Ga film, which has an added Ga concentration of 1 to 40 at % and into which Na is well added, by a sputtering method and a method for producing the sputtering target. The sputtering target has a component composition that contains 1 to 40 at % of Ga, 0.05 to 2 at % of Na as metal element components other than F, S and Se, and the balance composed of Cu and unavoidable impurities. The sputtering target contains Na in at least one form selected from among sodium fluoride, sodium sulfide, and sodium selenide, and has a content of oxygen of from 100 to 1,000 ppm.


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