The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 23, 2017

Filed:

Jan. 24, 2014
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Chun Hao Liao, Hsinchu, TW;

Chu Fu Chen, Zhubei, TW;

Po-Ju Chiu, Caotun Township, TW;

Jun Yean Chiou, Jhudong Township, TW;

Chao-Jen Cheng, Zhubei, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 51/56 (2006.01); H01L 21/70 (2006.01); G01R 31/26 (2014.01); G01R 31/28 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2648 (2013.01); G01R 31/2831 (2013.01); H01L 22/34 (2013.01); H01L 22/12 (2013.01);
Abstract

A semiconductor device comprises a first layer, a second layer configured to overlap with the first layer at a plurality of positions, a plurality of first layer contacts configured to be selectively activated to test the first layer for a first layer leakage current, and a plurality of second layer contacts configured to be selectively activated to test the second layer for a second layer leakage current. The first layer contacts are arranged on the first layer on a first side and a second side of the plurality of positions at which the second layer overlaps with the first layer. The second layer contacts are arranged on the second layer on a third side and a fourth side of the plurality of positions at which the second layer overlaps with the first layer. A determined first layer leakage current or second layer leakage current is indicative of the presence of a crystal defect in the semiconductor device.


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