The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 16, 2017

Filed:

Dec. 17, 2014
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Takashi Ando, Tuckahoe, NY (US);

Eduard A. Cartier, New York, NY (US);

Michael P. Chudzik, Sunnyvale, CA (US);

Aritra Dasgupta, Wappingers Falls, NY (US);

Herbert L. Ho, New Windsor, NY (US);

Donghun Kang, Hopewell Junction, NY (US);

Rishikesh Krishnan, Painted Post, NY (US);

Vijay Narayanan, New York, NY (US);

Kern Rim, Yorktown Heights, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 49/02 (2006.01); H01L 27/108 (2006.01); H01L 23/26 (2006.01);
U.S. Cl.
CPC ...
H01L 28/90 (2013.01); H01L 23/26 (2013.01); H01L 27/1087 (2013.01); H01L 27/10861 (2013.01); H01L 28/60 (2013.01); H01L 29/66181 (2013.01); H01L 2924/0002 (2013.01);
Abstract

A method including forming an oxygen gettering layer on one side of an insulating layer of a deep trench capacitor between the insulating layer and a substrate, the oxygen gettering layer including an aluminum containing compound, and depositing an inner electrode on top of the insulating layer, the inner electrode including a metal.


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