The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 16, 2017

Filed:

Apr. 08, 2016
Applicant:

Globalfoundries Singapore Pte. Ltd., Singapore, SG;

Inventors:

Khee Yong Lim, Singapore, SG;

Jae Han Cha, Singapore, SG;

Chia Ching Yeo, Singapore, SG;

Kiok Boone Elgin Quek, Singapore, SG;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/84 (2006.01); H01L 21/8234 (2006.01);
U.S. Cl.
CPC ...
H01L 21/84 (2013.01); H01L 21/823418 (2013.01); H01L 21/823481 (2013.01);
Abstract

A method for fabricating an integrated circuit that include providing or obtaining an extremely thin silicon-on-insulator (ETSOI) substrate, dividing the ETSOI substrate into a low voltage field effect transistor (FET) region and one or both of a medium voltage FET region and a high voltage FET regions, and forming a low voltage FET within the low voltage FET regions and forming a medium and/or high voltage FET within the medium and/or high voltage FET region(s). Channel, source, and drain structures of the low voltage FET are formed in an upper silicon layer that is disposed above a buried oxide layer of the ETSOI substrate, whereas channel, source, and drain structures of the medium and/or high voltage FETs are formed at least partially below the upper silicon layer.


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