The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 16, 2017
Filed:
Aug. 28, 2015
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventor:
Heiko Feldmann, Aalen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G02B 26/06 (2006.01); G02B 27/09 (2006.01); G02B 27/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70266 (2013.01); G03F 7/7015 (2013.01); G03F 7/70258 (2013.01); G03F 7/70308 (2013.01); G02B 26/06 (2013.01); G02B 27/0068 (2013.01); G02B 27/0988 (2013.01);
Abstract
A projection lens for imaging a pattern arranged in an object plane of the projection lens into an image plane of the projection lens via electromagnetic radiation having an operating wavelength λ<260 nm has a multiplicity of optical elements having optical surfaces which are arranged in a projection beam path between the object plane and the image plane. Provision is made of a wavefront manipulation system for dynamically influencing the wavefront of the projection radiation passing from the object plane to the image plane.