The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 16, 2017
Filed:
Jul. 09, 2015
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
An arrangement for the actuation of an element in an optical system. The arrangement includes first actuation and second actuation units for tilting the element about at least two different tilting axes. The first and second actuation units respectively include a flexure unit arranged outside an area defined by the element. Each flexure unit includes a first flexing element, rotatable with respect to a first axis of rotation, and a second flexing element, rotatable with respect to a second axis of rotation. For each flexure unit, the two associated axes of rotation intersect at a virtual connecting point of the flexure unit concerned to the optical element. The virtual connecting point is arranged in the area defined by the element and defines a rotating point for the element.