The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 16, 2017

Filed:

Jul. 29, 2014
Applicant:

Corning Incorporated, Corning, NY (US);

Inventors:

Joshua Monroe Cobb, Victor, NY (US);

Thomas James Dunn, Penfield, NY (US);

John Weston Frankovich, Fairport, NY (US);

Assignee:

Corning Incorporated, Corning, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); G01B 11/06 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02022 (2013.01); G01B 9/02021 (2013.01); G01B 9/02027 (2013.01); G01B 9/02041 (2013.01); G01B 9/02072 (2013.04); G01B 11/06 (2013.01); G01B 2290/30 (2013.01);
Abstract

A grazing-incidence interferometer includes first and second spaced-apart diffractive optical elements with a generally planar object disposed therebetween. The first diffractive optical element forms sheared first-diffracted-order light beams that reflect from opposite first and second surfaces of the object at grazing-incidence angles, while a zero-diffracted-order light beam goes unreflected. The second diffractive optical element combines the unreflected zero-diffracted-order light beam and the sheared reflected beams to form a collimated, combined beam. A 1× double-telecentric relay system relays the combined beam to a folding optical system that forms first and second interference images on a diffusing screen located at an image plane. Digital images of the first and second interference images are obtained and processed to characterize the thickness variation of the object.


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