The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 16, 2017

Filed:

Jan. 22, 2015
Applicant:

Dynaloy, Llc, Kingsport, TN (US);

Inventors:

Travis Acra, Ingalls, IN (US);

Richard Dalton Peters, Westfield, IN (US);

Kimberly Dona Pollard, Pendleton, IN (US);

Donald James Pfettscher, Martinsville, IN (US);

Assignee:

Dynaloy, LLC, Kingsport, TN (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C11D 3/30 (2006.01); C11D 7/32 (2006.01); C11D 7/50 (2006.01); C11D 7/26 (2006.01); H01L 21/027 (2006.01); H01L 23/00 (2006.01); H01L 21/02 (2006.01); C11D 11/00 (2006.01); C11D 3/20 (2006.01);
U.S. Cl.
CPC ...
C11D 7/3209 (2013.01); C11D 7/261 (2013.01); C11D 7/263 (2013.01); C11D 7/3218 (2013.01); C11D 7/3263 (2013.01); C11D 11/0047 (2013.01); H01L 21/02068 (2013.01); H01L 21/0275 (2013.01); H01L 24/11 (2013.01); C11D 3/2068 (2013.01); H01L 24/13 (2013.01); H01L 24/14 (2013.01); H01L 2224/11002 (2013.01); H01L 2224/1132 (2013.01); H01L 2224/1146 (2013.01); H01L 2224/1147 (2013.01); H01L 2224/11849 (2013.01); H01L 2224/131 (2013.01); H01L 2224/14181 (2013.01); H01L 2224/16145 (2013.01); H01L 2224/16227 (2013.01);
Abstract

The disclosure is directed solutions and processes to remove substances from substrates. Optionally, the substances can include photoresist on semiconductor wafers. The solution may include a quaternary ammonium hydroxide, a first amine, a second amine, and a third amine with the total amount of amine being no greater than about 95% by weight of a total weight of the solution. Additionally, a solution may include at least one amine, a quaternary ammonium hydroxide, and water and be free of a polar solvent other than water with the solution having a dynamic viscosity that is no greater than about 60 centipoise.


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